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Experimental determination of the lateral resolution of surface electric potential measurements by Kelvin probe force microscopy using biased electrodes separated by a nanoscale gap and application to thin-film transistors.

Authors :
Brouillard, Melanie
Bercu, Nicolas
Zschieschang, Ute
Simonetti, Olivier
Mittapalli, Rakesh
Klauk, Hagen
Giraudet, Louis
Source :
Nanoscale Advances; 4/21/2022, Vol. 4 Issue 8, p2018-2028, 11p
Publication Year :
2022

Details

Language :
English
ISSN :
25160230
Volume :
4
Issue :
8
Database :
Complementary Index
Journal :
Nanoscale Advances
Publication Type :
Academic Journal
Accession number :
156423997
Full Text :
https://doi.org/10.1039/d1na00824b