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Effects of the electric field at the edge of a substrate to deposit a Ă100 mm uniform diamond film in a 2.45 GHz MPCVD system.
- Source :
- Plasma Science & Technology; Apr2022, Vol. 24 Issue 4, p1-8, 8p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 10090630
- Volume :
- 24
- Issue :
- 4
- Database :
- Complementary Index
- Journal :
- Plasma Science & Technology
- Publication Type :
- Academic Journal
- Accession number :
- 156248224
- Full Text :
- https://doi.org/10.1088/2058-6272/ac4deb