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Effects of the electric field at the edge of a substrate to deposit a Ø100 mm uniform diamond film in a 2.45 GHz MPCVD system.

Details

Language :
English
ISSN :
10090630
Volume :
24
Issue :
4
Database :
Complementary Index
Journal :
Plasma Science & Technology
Publication Type :
Academic Journal
Accession number :
156248224
Full Text :
https://doi.org/10.1088/2058-6272/ac4deb