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Investigation on surface figure control technology of medium-aperture optical component based on double-sided polishing.
- Source :
- Proceedings of SPIE; 2/7/2022, Vol. 12071, p120710D-120710D-6, 1p
- Publication Year :
- 2022
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 12071
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 155081780
- Full Text :
- https://doi.org/10.1117/12.2604933