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INFLUENCES OF MATERIAL SOURCE, WAFER PROCESS AND LOCATION ON SILICON DIE FRACTURE STRENGTH.

Authors :
Liu, D. S.
Shih, Y. S.
Ni, C. Y.
Chiou, D. Y.
Chung, C. L.
Huang, M. L.
Source :
Experimental Techniques; Nov/Dec2002, Vol. 26 Issue 6, p29-35, 7p, 3 Black and White Photographs, 2 Diagrams, 2 Charts, 4 Graphs
Publication Year :
2002

Abstract

Investigates the external factors that influenced die fracture strength using three-point bending test and statistical analysis. Causes of fracture modes for the die samples; Factors that contributed to the variations in die fracture strength; Comparison between the effects of wafers fabricated with electrical circuits and raw wafers on die fracture strength and strength variations.

Details

Language :
English
ISSN :
07328818
Volume :
26
Issue :
6
Database :
Complementary Index
Journal :
Experimental Techniques
Publication Type :
Academic Journal
Accession number :
15455868
Full Text :
https://doi.org/10.1111/j.1747-1567.2002.tb00088.x