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Acoustic Loss of GHz Higher-Order Lamb Waves in Thin-Film Lithium Niobate: A Comparative Study.
- Source :
- Journal of Microelectromechanical Systems; Dec2021, Vol. 30 Issue 6, p876-884, 9p
- Publication Year :
- 2021
-
Abstract
- This work reports a comparative study of acoustic loss between different Lamb waves at GHz in thin-film lithium niobate (LiNbO3). The propagation loss (PL) of higher-order Lamb waves in thin-film LiNbO3 is studied for the first time using acoustic delay line (ADL) testbeds. The acoustic wave attenuation and quality factors ($Q$) of different Lamb waves are extracted, showing higher $Q\text{s}$ for higher-order Lamb modes than fundamental modes in air and vacuum at room temperature. The extracted $Q\text{s}$ are higher than those reported in thin-film LiNbO3 resonators, implying the electrode and anchor-induced loss as the dominant loss factors. The ADL-based loss analysis framework is readily extendable to acoustic damping study in other microwave acoustic platforms. [2021-0165] [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10577157
- Volume :
- 30
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Journal of Microelectromechanical Systems
- Publication Type :
- Academic Journal
- Accession number :
- 153925998
- Full Text :
- https://doi.org/10.1109/JMEMS.2021.3114627