Diffusion of dopants and impurities in β-Ga2O3.

MLA

Sharma, Ribhu, et al. “Diffusion of Dopants and Impurities in β-Ga2O3.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, vol. 39, no. 6, Nov. 2021, pp. 1–21. EBSCOhost, https://doi.org/10.1116/6.0001307.

APA

Sharma, R., Law, M. E., Ren, F., Polyakov, A. Y., & Pearton, S. J. (2021). Diffusion of dopants and impurities in β-Ga2O3. Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films, 39(6), 1–21. https://doi.org/10.1116/6.0001307

Chicago

Sharma, Ribhu, Mark E. Law, Fan Ren, Alexander Y. Polyakov, and Stephen J. Pearton. 2021. “Diffusion of Dopants and Impurities in β-Ga2O3.” Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films 39 (6): 1–21. doi:10.1116/6.0001307.