Study of the iron distribution profile and the influence of annealing on the structure implanted in silicon.

MLA

Egamberdiev, B. E., et al. “Study of the Iron Distribution Profile and the Influence of Annealing on the Structure Implanted in Silicon.” AIP Conference Proceedings, vol. 2402, no. 1, Nov. 2021, pp. 1–6. EBSCOhost, https://doi.org/10.1063/5.0071382.

APA

Egamberdiev, B. E., Mallayev, A. S., Sayfulloev, S. A., & Rahmatov, M. I. (2021). Study of the iron distribution profile and the influence of annealing on the structure implanted in silicon. AIP Conference Proceedings, 2402(1), 1–6. https://doi.org/10.1063/5.0071382

Chicago

Egamberdiev, B. E., A. S. Mallayev, Sh. A. Sayfulloev, and M. I. Rahmatov. 2021. “Study of the Iron Distribution Profile and the Influence of Annealing on the Structure Implanted in Silicon.” AIP Conference Proceedings 2402 (1): 1–6. doi:10.1063/5.0071382.