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Silicon monolithic microflow sensors: a review.
- Source :
- Journal of Micromechanics & Microengineering; Oct2021, Vol. 31 Issue 10, p1-22, 22p
- Publication Year :
- 2021
-
Abstract
- Flow measurement is an essential requirement in medical, industrial, automotive and environmental applications, Thanks to the rapid development of microelectromechanical system (MEMS) micro-fabrication techniques, silicon-based microflow sensor chips used as the key component of microfluidic control systems have attracted particular attentions due to the miniaturized chip-size, high precision, low power consumption, rapid response and low-cost batch-fabrication capability. Up to present, many different types of silicon microflow sensors have been proposed and developed. This paper provides a review on recently completed works on design, fabrication and properties of the MEMS-based silicon monolithic microflow sensors. Some technical challenges and application outlooks are also discussed in the paper. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 13616439
- Volume :
- 31
- Issue :
- 10
- Database :
- Complementary Index
- Journal :
- Journal of Micromechanics & Microengineering
- Publication Type :
- Academic Journal
- Accession number :
- 152817951
- Full Text :
- https://doi.org/10.1088/1361-6439/ac1f3a