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Unexpected phosphorus doping routine of planar silicon nanowires for integrating CMOS logics.
- Source :
- Nanoscale; 9/21/2021, Vol. 13 Issue 35, p15031-15037, 7p
- Publication Year :
- 2021
Details
- Language :
- English
- ISSN :
- 20403364
- Volume :
- 13
- Issue :
- 35
- Database :
- Complementary Index
- Journal :
- Nanoscale
- Publication Type :
- Academic Journal
- Accession number :
- 152521835
- Full Text :
- https://doi.org/10.1039/d1nr03014k