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后退火气氛对磁控溅射制备 β-Ga2O3 薄膜材料的影响.

Authors :
姬凯迪
高灿灿
杨发顺
熊倩
马奎
Source :
Journal of Synthetic Crystals; Jun2021, Vol. 50 Issue 6, p1056-1061, 6p
Publication Year :
2021

Details

Language :
Chinese
ISSN :
1000985X
Volume :
50
Issue :
6
Database :
Complementary Index
Journal :
Journal of Synthetic Crystals
Publication Type :
Academic Journal
Accession number :
151274712