Film Characterization of Low-Temperature Silicon Carbon Nitride for Direct Bonding Applications.

Details

Language :

English

ISSN :

21628769

Volume :

9

Issue :

12

Database :

Complementary Index

Journal :

ECS Journal of Solid State Science & Technology

Publication Type :

Academic Journal

Accession number :

150598571

Full Text :

https://doi.org/10.1149/2162-8777/abd260