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High sensitivity x-ray detectors based on 4H-SiC p-i-n structure with 80 μm thick intrinsic layer.
- Source :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Mar2021, Vol. 39 Issue 2, p1-6, 6p
- Publication Year :
- 2021
-
Abstract
- In this work, a large size x-ray detector with a 25 mm<superscript>2</superscript> active area is demonstrated based on a thick 4H-SiC p-i-n structure. The detector exhibits obvious merits of high photon sensitivity over 4 × 10<superscript>4</superscript>μC Gy<superscript>−1</superscript> cm<superscript>−2</superscript>, good photon-response linearity, and high-temperature operation compatibility. Meanwhile, due to the ultralow leakage current level achieved, single photon detection performance for x-ray photons is further realized with energy resolutions of 1.1 and 4.9 keV at 5.9 and 59.5 keV, respectively. This work thus suggests the significant potentials of wide-bandgap SiC semiconductor for photon-resolved x-ray detection in a harsh environment. [ABSTRACT FROM AUTHOR]
- Subjects :
- X-ray detection
WIDE gap semiconductors
X-rays
DETECTORS
PHOTONS
Subjects
Details
- Language :
- English
- ISSN :
- 21662746
- Volume :
- 39
- Issue :
- 2
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 149527163
- Full Text :
- https://doi.org/10.1116/6.0000829