Custom vacuum load-lock for the sputtering vacuum chamber, loading/unloading and locking automatisation mechanisms.

This paper presents the continuity of my work presented in previous articles regarding my activity as a PhD student at the University of Oradea, Doctoral School of Industrial Engineering. After installing, cleaning, vacuum testing and developing an experimental system for vacuum measurement, we decided that the next best step would be to develop the system with a load-lock further, as the time required for experiments would drastically improve and the need for refurbishing the old positioning mechanism would be eliminated. The paper describes the steps taken, starting with CAD representing the sputtering vacuum chamber for the manufacturer to start their production process, and finalising with automating the whole start/stop and reload sequence for the load-lock with an experimental setup made from readily available equipment in our laboratory, as the initial sequences were manually only and the risk of misusing for non-trained personnel would be high. [ABSTRACT FROM AUTHOR]