Electrochemical Deposition of DLC Films Embedded with Crystalline Graphite and Multilayer Graphene.

Diamond-like carbon (DLC) films embedded with crystalline graphite and multilayer graphene have been fabricated on silicon substrates by a simple electrochemical route from methanol and C₆₀-1, 2-ethylenediamine (C₂H₈N₂) derivatives as an incorporating reagent at atmospheric pressure. The structure and sheet resistivity of the as-obtained films were characterized by x-ray photoelectron spectroscopy, Fourier-transform infrared (FTIR) spectroscopy, scanning electron microscopy, high-resolution transmission electron microscopy, and four-point probe measurements, respectively. The structure of the as-prepared films with crystalline graphite and multilayer graphene consisted of sp² C, sp³ C, C–N, C–H, and N–H bonds. After introducing crystalline graphite and multilayer graphene, the conductivity of the DLC films was evidently improved and the sheet resistivity drastically decreased from 10⁸ Ω cm to about 80 Ω cm. [ABSTRACT FROM AUTHOR]