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Strained Silicon on Insulator wafers made by the Smart Cut™ technology.

Authors :
Ghyselen, B.
Bogumilowicz, Y.
Aulnette, C.
Abbadie, A.
Osternaud, B.
Besson, P.
Daval, N.
Andrieu, F.
Cayrefourq, I.
Moriceau, H.
Ernst, T.
Tiberj, A.
Rayssac, O.
Blondeau, B.
Mazure, C.
Lagahe-Blanchard, C.
Pocas, S.
Cartier, A.-M.
Hartmann, J.-M.
Leduc, P.
Source :
MRS Online Proceedings Library; 204, Vol. 809 Issue 1, p1-6, 6p
Publication Year :
2004

Details

Language :
English
ISSN :
19464274
Volume :
809
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
148699585
Full Text :
https://doi.org/10.1557/PROC-809-B2.3
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