Conformal deposition of a silicon-oxide and a fluorocarbon on a nano-shaped material in supercritical carbon dioxide.

Details

Language :

English

ISSN :

19464274

Volume :

890

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148675203

Full Text :

https://doi.org/10.1557/PROC-0890-Y08-14