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Deactivation of Ultra Shallow B and BF2 Profiles After Non-Melt Laser Annealing.
- Source :
- MRS Online Proceedings Library; 2006, Vol. 912 Issue 1, p1-5, 5p
- Publication Year :
- 2006
Details
- Language :
- English
- ISSN :
- 19464274
- Volume :
- 912
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- MRS Online Proceedings Library
- Publication Type :
- Conference
- Accession number :
- 148564445
- Full Text :
- https://doi.org/10.1557/PROC-0912-C04-07