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Physics-Based Diffusion Simulations for Preamorphized Ultrashallow Junctions.
- Source :
- MRS Online Proceedings Library; 2003, Vol. 765 Issue 1, p1-6, 6p
- Publication Year :
- 2003
Details
- Language :
- English
- ISSN :
- 19464274
- Volume :
- 765
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- MRS Online Proceedings Library
- Publication Type :
- Conference
- Accession number :
- 148521613
- Full Text :
- https://doi.org/10.1557/PROC-765-D6.8