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Strain Relaxation in Si1-xGex Thin Films on Si (100) Substrates: Modeling and Comparisons with Experiments.

Authors :
Kolluri, Kedarnath
Zepeda-Ruiz, Luis A.
Murthy, Cheruvu S.
Maroudas, Dimitrios
Source :
MRS Online Proceedings Library; 2005, Vol. 875 Issue 1, p1-6, 6p
Publication Year :
2005

Details

Language :
English
ISSN :
19464274
Volume :
875
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
148451610
Full Text :
https://doi.org/10.1557/PROC-875-O4.21