Hinge Sensitivity in a Micro-Rotating Structure for predicting Induced Thermo Mechanical Stress in Integrated Circuit Metal Interconnects.

Details

Language :

English

ISSN :

19464274

Volume :

795

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148038773

Full Text :

https://doi.org/10.1557/PROC-69-U10.10