Effect of Elevated Implant Temperature on Amorphization and Activation in As-implanted Silicon-on-insulator Layers.

Details

Language :

English

ISSN :

19464274

Volume :

1070

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

148001195

Full Text :

https://doi.org/10.1557/PROC-1070-E05-02