Back to Search
Start Over
Material and Electrical Characterization of Nickel Silicide-Carbon as Contact Metal to Silicon-Carbon Source and Drain Stressors.
- Source :
- MRS Online Proceedings Library; 2007, Vol. 995 Issue 1, p1-6, 6p
- Publication Year :
- 2007
Details
- Language :
- English
- ISSN :
- 19464274
- Volume :
- 995
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- MRS Online Proceedings Library
- Publication Type :
- Conference
- Accession number :
- 147647478
- Full Text :
- https://doi.org/10.1557/PROC-0995-G05-07