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Material and Electrical Characterization of Nickel Silicide-Carbon as Contact Metal to Silicon-Carbon Source and Drain Stressors.

Authors :
Lee, Rinus Tek Po
Yang, Li-Tao
Ang, Kah-Wee
Liow, Tsung-Yang
Tan, Kian-Ming
Wong, Andrew See-Weng
Samudra, Ganesh S.
Chi, Dong-Zhi
Yeo, Yee-Chia
Source :
MRS Online Proceedings Library; 2007, Vol. 995 Issue 1, p1-6, 6p
Publication Year :
2007

Details

Language :
English
ISSN :
19464274
Volume :
995
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
147647478
Full Text :
https://doi.org/10.1557/PROC-0995-G05-07