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Diffusion Engineering by Carbon in Silicon.

Authors :
Goesele, Ulrich
Laveant, Pierre
Scholz, Rene
Engler, Norbert
Werner, Peter
Source :
MRS Online Proceedings Library; 2000, Vol. 610 Issue 1, p1-12, 12p
Publication Year :
2000

Details

Language :
English
ISSN :
19464274
Volume :
610
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
147384751
Full Text :
https://doi.org/10.1557/PROC-610-B7.11