Relationships between the thermal stability, friction, and wear properties of reactively sputtered Si–aC:H thin films.

Details

Language :

English

ISSN :

08842914

Volume :

17

Issue :

11

Database :

Complementary Index

Journal :

Journal of Materials Research

Publication Type :

Academic Journal

Accession number :

147316168

Full Text :

https://doi.org/10.1557/JMR.2002.0419