Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications.

Details

Language :

English

ISSN :

08842914

Volume :

16

Issue :

6

Database :

Complementary Index

Journal :

Journal of Materials Research

Publication Type :

Academic Journal

Accession number :

147315857

Full Text :

https://doi.org/10.1557/JMR.2001.0253