Response Analysis of Nonlinear Free Vibration of Parallel-Plate MEMS Actuators: An Analytical Approximate Method.

Purpose: In this work, nonlinear free vibration of electrostatically actuated micromechanical system has been investigated. These nonlinear solutions are analytically derived. Methods: An undamped spring-mass model and dynamic equation of motion are employed for the parallel-plate microelectrostatic actuator. The first analytical approximate period and periodic solution of the mentioned problems are constructed with the help of Galerkin's method and coupling of Galerkin's with Newton's method. In addition, the second and third analytical approximate solutions are also derived. The "exact" solutions are obtained from direct integration. Results: In this work, the well-known static and dynamic pull-in parameters are discussed. Phase trajectory becomes non-periodic with the dynamic pull-in point. The approximate and "exact" solutions of period, phase trajectory, and time-dependent displacement of microelectrostatic actuators at various physical parameters are obtained and compared. Conclusions: It is found that the analytical approximate solutions are not only an explicit expression but also have excellent precision for a wide range of nonlinear vibration with different amplitudes. [ABSTRACT FROM AUTHOR]