Microwave Volt–Impedance Spectroscopy of Semiconductors.

The previously proposed technique of microwave volt–impedance spectroscopy of semiconductors has been experimentally verified. The technique allows one to determine the local values of electrical parameters of a semiconductor. The investigations have been carried out on a homogeneous single-crystal GaAs wafer with a system of concentric antennas formed on the top of it. The resolution is determined by the antenna central disk diameter, which has been 12, 27, and 57 μm. A dc bias voltage of 0 V ≤ U ≤ 5 V has been applied between antenna contact pads. The complex Z(f, U) impedance spectrum of each antenna has been measured on a Cascade Microtech probe station in the frequency range of f = 0.1–10 GHz. The electrical characteristics of the semiconductor have been determined from the Z(f, U) spectra by solving the inverse problem. The n-type of the semiconductor has been established, and the contact potential difference at the interface with a metal has been determined. The local values of electron density, mobility and electrical conductivity have been found have been found. The four-point probe Hall effect measurements of the surface-averaged values of the same parameters have shown good agreement of the results for the investigated homogeneous wafer. [ABSTRACT FROM AUTHOR]