Electronic Properties and Device Applications of Hot-Wire CVD Polycrystalline Silicon Films.

Details

Language :

English

ISSN :

19464274

Volume :

467

Issue :

1

Database :

Complementary Index

Journal :

MRS Online Proceedings Library

Publication Type :

Conference

Accession number :

146933963

Full Text :

https://doi.org/10.1557/PROC-467-271