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A Tale of Two Precursors: UHV-CVD of TiO2 From Titanium Nitrate and Titanium Isopropoxide.

Authors :
Gladfelter, Wayne L.
Taylor, Charles J.
Gilmer, David C.
Colombo, Daniel G.
Wilk, G. D.
Campbell, Stephen A.
Roberts, Jeff
Source :
MRS Online Proceedings Library; Dec1999, Vol. 561 Issue 1, p349-354, 6p
Publication Year :
1999

Details

Language :
English
ISSN :
19464274
Volume :
561
Issue :
1
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
146705465
Full Text :
https://doi.org/10.1557/PROC-567-349