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Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system.
- Source :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Sep2020, Vol. 38 Issue 5, p1-13, 13p
- Publication Year :
- 2020
-
Abstract
- Rectangular-shaped oxygen O<subscript>2</subscript><superscript>+</superscript> ion beam thinning for scanning transmission electron microscope (STEM) sample preparation was investigated using a projection ion beam optical system equipped with a duoplasmatron gas ion source. The ion current can be increased by increasing the area of the rectangular-shaped oxygen ion beam and thereby overcome the low brightness of the ion source. Rectangular-shaped O<subscript>2</subscript><superscript>+</superscript> ion beams with different amounts of projection beam edge blur were formed in the X and Y directions by using a limiting mask between the ion source and projection mask. Gallium-contamination-free STEM sample preparation (rough, medium, and fine milling) was demonstrated using a projection ion beam optical system and three types of rectangular-shaped oxygen ion beams. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 21662746
- Volume :
- 38
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
- Publication Type :
- Academic Journal
- Accession number :
- 146072741
- Full Text :
- https://doi.org/10.1116/6.0000297