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Epitaxial BiFeO3 thin films on Si.
- Source :
- Applied Physics Letters; 9/27/2004, Vol. 85 Issue 13, p2574-2576, 3p, 1 Chart, 4 Graphs
- Publication Year :
- 2004
-
Abstract
- BiFeO<subscript>3</subscript> was studied as an alternative environmentally clean ferro/piezoelectric material. 200-nm-thick BiFeO<subscript>3</subscript> films were grown on Si substrates with SrTiO<subscript>3</subscript> as a template layer and SrRuO<subscript>3</subscript> as bottom electrode. X-ray and transmission electron microscopy studies confirmed the epitaxial growth of the films. The spontaneous polarization of the films was ∼45 μC/cm<superscript>2</superscript>. Retention measurement up to several days showed no decay of polarization. A piezoelectric coefficient (d<subscript>33</subscript>) of ∼60 pm/V was observed, which is promising for applications in micro-electro-mechanical systems and actuators. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 85
- Issue :
- 13
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 14546597
- Full Text :
- https://doi.org/10.1063/1.1799234