Cite
声表面波器件晶圆键合工艺研究.
MLA
卢丹丹, et al. “声表面波器件晶圆键合工艺研究. (Chinese).” Piezoelectrics & Acoustooptics, vol. 42, no. 3, June 2020, pp. 361–64. EBSCOhost, https://doi.org/10.11977/j.issn.1004-2474.2020.03.018.
APA
卢丹丹, 米 佳, 彭兴文, 谭昕怡, & 金 中. (2020). 声表面波器件晶圆键合工艺研究. (Chinese). Piezoelectrics & Acoustooptics, 42(3), 361–364. https://doi.org/10.11977/j.issn.1004-2474.2020.03.018
Chicago
卢丹丹, 米 佳, 彭兴文, 谭昕怡, and 金 中. 2020. “声表面波器件晶圆键合工艺研究. (Chinese).” Piezoelectrics & Acoustooptics 42 (3): 361–64. doi:10.11977/j.issn.1004-2474.2020.03.018.