Cite
A low-cost fabrication method of nanostructures by ultraviolet proximity exposing lithography.
MLA
Liu, Lingpeng, et al. “A Low-Cost Fabrication Method of Nanostructures by Ultraviolet Proximity Exposing Lithography.” AIP Advances, vol. 10, no. 4, Apr. 2020, pp. 1–5. EBSCOhost, https://doi.org/10.1063/5.0002942.
APA
Liu, L., Sun, L., Qi, L., Guo, R., Li, K., Yin, Z., Wu, D., & Zou, H. (2020). A low-cost fabrication method of nanostructures by ultraviolet proximity exposing lithography. AIP Advances, 10(4), 1–5. https://doi.org/10.1063/5.0002942
Chicago
Liu, Lingpeng, Lei Sun, Liping Qi, Ran Guo, Kehong Li, Zhifu Yin, Dongjiang Wu, and Helin Zou. 2020. “A Low-Cost Fabrication Method of Nanostructures by Ultraviolet Proximity Exposing Lithography.” AIP Advances 10 (4): 1–5. doi:10.1063/5.0002942.