Back to Search Start Over

Automated semiconductor wafer defect classification dealing with imbalanced data.

Authors :
Adan, Ofer
Robinson, John C.
Lee, Po-Hsuan
Wang, Zhe
Teh, Cho
Hsiao, Yi-Sing
Fang, Wei
Source :
Proceedings of SPIE; 1/23/2020, Vol. 11325, p1132526-1132526, 1p
Publication Year :
2020

Details

Language :
English
ISSN :
0277786X
Volume :
11325
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
142772351
Full Text :
https://doi.org/10.1117/12.2552838