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Probability prediction of EUV process failure due to resist-exposure stochastic: applications of Gaussian random fields excursions and Rice's formula.
- Source :
- Proceedings of SPIE; 1/21/2020, Vol. 11323, p113230L-113230L-25, 1p
- Publication Year :
- 2020
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11323
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 142772260
- Full Text :
- https://doi.org/10.1117/12.2551965