Synthesis and Sensor Characteristics of Nanoscale Thin Films in the In2O3–SnO2 and Y2O3–TbOx(CeOx) Systems.

(In₂O₃)_0.95(SnO₂)_0.05, (TbO_х)_0.50(Y₂O₃)_0.50, and (CeO₂)_0.80(Y₂O₃)_0.20 single-phase cubic solid solution xerogels and nanocrystalline powders have been synthesized via coprecipitation of hydroxides. Using these powders as precursors, nanoscale film electroconductive materials on a corundum substrate have been produced by screen printing. The highest speed of sensor response to ozone is attributed to In_0.95Sn_0.05O_1.5 films, reaching 8–10 s at a temperature of 473 K. (TbO_х)_0.50(Y₂O₃)_0.50 thin film is found to be sensitive to changes in the concentrations of (CO + CO₂) (the sensitivity coefficient S = 25.11) and ozone (S = 3.16–7.94). (CeO₂)_0.80(Y₂O₃)_0.20 film exhibits a sensor response to (CO + CO₂) (S = 3.10). This study opens up the prospects of using the obtained nanopowders and relevant thin films as materials for resistive gas sensors operating at oxygen pressures of 10³–10⁴ Pa. [ABSTRACT FROM AUTHOR]