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Inspection of semiconductor-based planar wave-guiding structures with a near-infrared transmission digital holographic microscopy.

Authors :
Angelsky, Oleg V.
Besaga, Vira R.
Gerhardt, Nils C.
Hofmann, Martin R.
Source :
Proceedings of SPIE; 3/7/2020, Vol. 11369, p1136911-1136911, 1p
Publication Year :
2020

Details

Language :
English
ISSN :
0277786X
Volume :
11369
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
141979349
Full Text :
https://doi.org/10.1117/12.2553911