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Empirical modeling and Monte Carlo simulation of secondary electron yield reduction of laser drilled microporous gold surfaces.

Authors :
Iqbal, Asif
Ludwick, Jonathan
Fairchild, Steven
Cahay, Marc
Gortat, Daniel
Sparkes, Martin
O'Neill, William
Back, Tyson C.
Zhang, Peng
Source :
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2020, Vol. 38 Issue 1, p1-9, 9p
Publication Year :
2020

Abstract

This work investigates secondary electron yield (SEY) mitigation from a metal surface with a microporous array fabricated using the laser drilling technique. We propose a general empirical model to fit the experimentally measured SEY of a flat gold surface for normal and oblique incidences of primary electrons. Using this empirical model, we develop a two-dimensional Monte Carlo (MC) simulation scheme to determine the effective SEY of a microporous array. It is found that the SEY from a porous surface is significantly reduced compared to that of the flat surface. By taking into account all the generations of secondary electrons inside a well, our MC results are found to be in very good agreement with the experimental data. The dependence of the SEY on the aspect ratio of the micropores and porosity of the surface is examined. A simple empirical formula has been proposed to evaluate the effective SEY of the gold microporous array for pores of arbitrary aspect ratios. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
21662746
Volume :
38
Issue :
1
Database :
Complementary Index
Journal :
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
Publication Type :
Academic Journal
Accession number :
141397608
Full Text :
https://doi.org/10.1116/1.5130683