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Precise microscopic profilometry using diffractive image correlation and theoretical model simulation.
- Source :
- Proceedings of SPIE; 6/14/2019, Vol. 11102, p1-8, 8p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11102
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 139916955
- Full Text :
- https://doi.org/10.1117/12.2528597