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Sapphire Concave Microlens Arrays for High-Fluence Pulsed Laser Homogenization.
- Source :
- IEEE Photonics Technology Letters; 10/15/2019, Vol. 31 Issue 20, p1615-1618, 4p
- Publication Year :
- 2019
-
Abstract
- Microlens array has been demonstrated to be an effective method for laser beam homogenization. However, the homogenization of high-fluence laser beam is still a great challenge due to the serious damage to the microlens-array-based homogenizer. Here, an ultra-smooth sapphire concave microlens-array-based homogenizer, which is fabricated by dry-etching-assisted femtosecond laser machining, is proposed for shaping high-fluence pulsed laser beam to a flat-top profile intensity distribution. By taking advantages of high transmittance (>70%) and low surface roughness (1.1 nm), high-fluence (5 J/cm2) and wide-band (266 nm, 532 nm and 808 nm) laser beams homogenization is successfully realized by the sapphire concave microlens arrays. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10411135
- Volume :
- 31
- Issue :
- 20
- Database :
- Complementary Index
- Journal :
- IEEE Photonics Technology Letters
- Publication Type :
- Academic Journal
- Accession number :
- 139435039
- Full Text :
- https://doi.org/10.1109/LPT.2019.2939349