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Pyrolytic carbon resonators for micromechanical thermal analysis.
- Source :
- Microsystems & Nanoengineering; 10/21/2019, Vol. 5 Issue 1, p1-10, 10p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 20961030
- Volume :
- 5
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- Microsystems & Nanoengineering
- Publication Type :
- Academic Journal
- Accession number :
- 139262771
- Full Text :
- https://doi.org/10.1038/s41378-019-0094-x