The Study of Converse Piezoelectric-Effect of ZnO Thin Film.

Polycrystalline ZnO thin film has been deposited on Si cantilever beam substrate by pulsed laser deposition (PLD) technique. The high-resolution x-ray diffraction (HR-XRD) analysis suggests the formation of wurtzite structure along c-axis. The atomic force microscopy (AFM) measurement reveals the growth of a good crystalline film. We have studied the converse piezoelectric-effect of the as-deposited film from +3V to -3V dc voltage. The curve shows a butterfly type loop, which is in good agreement with available literatures. [ABSTRACT FROM AUTHOR]