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Aging of Al thin film extreme ultraviolet filters.

Authors :
Kolacek, Karel
Frolov, Alexandr
Schmidt, Jiri
Straus, Jaroslav
Hoffer, Petr
Stelmashuk, Vitaliy
Lukes, Petr
Juha, Libor
Source :
Proceedings of SPIE; 4/8/2019, Vol. 11035, p1-6, 6p
Publication Year :
2019

Details

Language :
English
ISSN :
0277786X
Volume :
11035
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
137633832
Full Text :
https://doi.org/10.1117/12.2521988
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