Back to Search
Start Over
Study on β-Ga2O3 Films Grown with Various VI/III Ratios by MOCVD.
- Source :
- Coatings (2079-6412); May2019, Vol. 9 Issue 5, p281-281, 1p
- Publication Year :
- 2019
-
Abstract
- β-Ga<subscript>2</subscript>O<subscript>3</subscript> films were grown on sapphire (0001) substrates with various O/Ga (VI/III) ratios by metal organic chemical vapor deposition. The effects of VI/III ratio on growth rate, structural, morphological, and Raman properties of the films were systematically studied. By varying the VI/III ratio, the crystalline quality obviously changed. By decreasing the VI/III ratio from 66.9 × 10<superscript>3</superscript> to 11.2 × 10<superscript>3</superscript>, the crystalline quality improved gradually, which was attributed to low nuclei density in the initial stage. However, crystalline quality degraded with further decrease of the VI/III ratio, which was attributed to excessive nucleation rate. [ABSTRACT FROM AUTHOR]
- Subjects :
- METAL organic chemical vapor deposition
SAPPHIRES
Subjects
Details
- Language :
- English
- ISSN :
- 20796412
- Volume :
- 9
- Issue :
- 5
- Database :
- Complementary Index
- Journal :
- Coatings (2079-6412)
- Publication Type :
- Academic Journal
- Accession number :
- 137289524
- Full Text :
- https://doi.org/10.3390/coatings9050281