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18‐2: Ultra‐Fine High Efficiency MicroLEDs with Testability and Transferability Using Layer‐Transfer Technology.
- Source :
- SID Symposium Digest of Technical Papers; Jun2019, Vol. 50 Issue 1, p236-239, 4p
- Publication Year :
- 2019
-
Abstract
- Layer‐transferred high quality GaN and GaAs QMAT templates make LED efficiency enhancements for super thin (<2um) and ultra‐fine (<5um) microLED structures. Templates have pre‐patterns which minimize sidewall loss, eliminate dry etch damage, and intrinsically control street width and die size. [ABSTRACT FROM AUTHOR]
- Subjects :
- TECHNOLOGY transfer
PLASMA etching
AUDITING standards
Subjects
Details
- Language :
- English
- ISSN :
- 0097966X
- Volume :
- 50
- Issue :
- 1
- Database :
- Complementary Index
- Journal :
- SID Symposium Digest of Technical Papers
- Publication Type :
- Academic Journal
- Accession number :
- 136710282
- Full Text :
- https://doi.org/10.1002/sdtp.12899