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Facile fabrication of 2-dimensional arrays of sub-10 nm single crystalline Si nanopillars using nanoparticle masks.

Authors :
Young-Kyu Hong
Jae Ho Bahng
Geunseop Lee
Hanchul Kim
Wondong Kim
Sekyung Lee
Ja-Yong Koo
Jong-Il Park
Woo-ram Lee
Jinwoo Cheon
Source :
Chemical Communications; Dec2003, Vol. 2003 Issue 24, p3034-3035, 2p
Publication Year :
2003

Details

Language :
English
ISSN :
13597345
Volume :
2003
Issue :
24
Database :
Complementary Index
Journal :
Chemical Communications
Publication Type :
Academic Journal
Accession number :
13560410