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Analysis of contacting characteristics on aerostatic bearing stylus displacement sensor.
- Source :
- Proceedings of SPIE; 4/26/2019, Vol. 11053, p1-6, 6p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 11053
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 135222816
- Full Text :
- https://doi.org/10.1117/12.2511216