Large Nonlinearity and Low Loss Ge-Sb-Se Glass Photonic Devices in Near-Infrared.

Ge28Sb12Se60 waveguides and microresonators were fabricated by thermal evaporation and dry etching technology. The low loss waveguides and high-index-contrast Ge28Sb12Se60 microring resonators were developed and demonstrated using the optimal parameters of CF4/CHF3 etching recipe. An intrinsic quality factor (Q-factor) of 2.3 × 105 with propagation loss of 2.4 dB/cm at 1550 nm was obtained in this microring resonator with 800 × 400 nm cross-sectional dimension. Critically coupled resonator showed extinction ratio of >30 dB. Nonlinear refractive index (n 2) of 5.12 × 10−18 m2/W for Ge28Sb12Se 60 glass was measured and nonlinear coefficient (γ) of 24 W−1 m −1 asfabricated waveguide was also estimated. This paper illustrates the potential of Ge28Sb 12Se60 glass as a low loss and large nonlinearity material for integrated photonics applications. [ABSTRACT FROM AUTHOR]