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Optimization of Optical Proximity Correction to Reduce Mask Write Time Using Genetic Algorithm.
- Source :
- Proceedings of SPIE; 1/16/2018, Vol. 10588, p1-8, 8p
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10588
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 129804567
- Full Text :
- https://doi.org/10.1117/12.2297400