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Exploration of BEOL line-space patterning options at 12 nm half-pitch and below.
- Source :
- Proceedings of SPIE; 1/17/2018, Vol. 10589, p105890E-1-105890E-13, 13p, 9 Black and White Photographs, 1 Diagram, 4 Graphs
- Publication Year :
- 2018
Details
- Language :
- English
- ISSN :
- 0277786X
- Volume :
- 10589
- Database :
- Complementary Index
- Journal :
- Proceedings of SPIE
- Publication Type :
- Conference
- Accession number :
- 129501577
- Full Text :
- https://doi.org/10.1117/12.2297183